Product Description
Application Fields:
It is suitable for vacuum dedusting system of single crystal furnace to effectively filter volatiles produced in the process of crystal pulling, realize the online dust cleaning, extend the continuous running time of single crystal growth furnace, greatly reduce the cost of pulling crystal, improve the quality of single crystal, To reduce equipment maintenance time and labor cost, it has been applied in more than 6000 single crystal furnaces in Ningxia, Yinchuan, Yunnan Longi, etc.
Application scope:
Suitable for 160 single crystal furnace.
Meet the site process requirements:
In the case that the effective running time of single crystal furnace is greater than 550H, Single cleaning ensures that the pressure fluctuation of single crystal furnace body is 10±1 torr. Limit vacuum ≤15mTorr, dry pump operating frequency is normal.
Technical features:
Filtration area of 12m2, standard atmospheric pressure under the processing capacity is not low thousand 360L/S;
3 groups of electromagnet vibration, single group stroke 60mm, vibration force is 35kg, power≤800W;
Pressure standard: first hit positive pressure 0.1mpa, check the large leak point, and then vacuum with dry pump, and then use ammonia leak detector for leak detection, leak detection standard is 5X10-10Pa·m3/s;
Sealing rings are made of fluorine rubber;
Internal parts anti-corrosion treatment: lock zinc passivation.